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Reports, briefs and technical notes from Cools on semiconductor packaging technology and industry.

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검은 배경에 쿨스 로고와 TECHNICAL NOTE 라벨, 가운데 HBM 12-HIGH 문구가 흰색으로 들어간 이미지.Technical noteHBM

Cools completes a 12-high HBM stack with dielectric-first bonding and a single-shot copper join

As HBM stacks reach 12 layers, the dies get thinner and the number of interfaces grows. Bonding and annealing layer by layer, or stacking the dielectric first and annealing the whole assembly in an oven, both put the entire stack through a thermal history. This technical note describes a process that fixes all 12 layers by dielectric bonding first and completes the copper joins in a single 1500 nm photothermal exposure. The full report is available in Korean. An English summary is provided on this page.