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The technologies and the adoption paths with which Cools clears the bottlenecks of semiconductor packaging.

HBM thermocompression bonding

Thermal Clutch

More than half of a thermocompression bonding cycle is cooling. The pace was set by air convection; we hand it to solid conduction.

A cooling device for bonding equipment. It lifts the cooling body away while the head is heating so no heat is lost, then puts it back in contact once the bond is complete to draw the heat out.

First validation cut the bonding cycle by 51% (7.0 to 3.4 seconds, measured, at equal bond quality).

See the related patents

Glass packaging

TGV metallisation platform

Interface delamination, microcracks and fill defects are what hold glass substrates back from volume production. All of them start where glass and copper fail to bond.

It builds a continuous interface down the full sidewall of a through-glass via first, then propagates the electrode along it in sequence, so the metallisation comes out without voids.

379 related patents filed.

See the related patents

Frequently asked questions

Why is cooling the bottleneck in thermocompression bonding?
More than half of a thermocompression bonding cycle is cooling, and the pace is set by air convection. The Thermal Clutch lifts the cooling body away while the head is heating so no heat is lost, then puts it back in contact once the bond is complete, handing the path to solid conduction.
How much can the bonding cycle be shortened?
First validation cut the bonding cycle by 51%, from 7.0 to 3.4 seconds, measured at equal bond quality.
Can hybrid bonding avoid heating the whole wafer?
Hybrid bonding heats an entire wafer for 0.5 to 4 hours to complete the Cu bond, even though the heat is needed only within a few micrometres of the interface. Light at 1500 nm sits in a band where interband absorption in silicon is suppressed, so it passes through the substrate and turns into heat for nanoseconds only in a thin absorbing layer behind the pad. The approach changes where and for how long heat is applied, not how hot it gets.
What causes interface delamination and fill defects in glass substrates?
They all start where glass and copper fail to bond. Building a continuous interface down the full sidewall of a through-glass via first, then propagating the electrode along it in sequence, produces metallisation without voids.
Can it be adopted without replacing existing bonding equipment?
Yes, through module and component supply. Functional modules such as the Thermal Clutch are supplied to existing equipment, which carries the lowest initial investment. The three adoption paths are module and component supply, equipment and process solutions, and IP licensing.